We offer expertise in the following Analytical Techniques:

Analytical Technique	Typical Applications	Signal Detected	Elements Detected	Organic Information	Detection Limits	Depth Resolution	Imaging/ Mapping	Lateral Resolution (Probe Size)
AFM/SPM	Surface imaging with near atomic resolution	Atomic scale roughness	-	-	-	0.01 nm	Yes	1.5 - 5 nm
Auger	Elemental surface analysis and high resolution depth profiling	Auger electrons from near-surface atoms	Li - U	-	0.1 - 1 at%	2 - 6 nm	Yes	100 nm
FE Auger	Elemental surface analysis, microanalysis, microarea depth profiling	Auger electrons from near-surface atoms	Li - U	-	0.01 - 1 at%	2 - 6 nm	Yes	<15 nm
FIB	Cross sections - especially Cu, resist, defects Thin sections for STEM/TEM	Secondary and backscattered electrons Secondary ions	B - U (EDS mode)	-	0.1 - 1 at%		Yes	>3 nm with SEM > 7 nm with FIB
micro-FTIR	Identification of polymers, plastics, contaminants, organic films, fibers, and liquids	Infrared absorption	-	Molecular groups	0.1 - 100 ppm	-	No	15 microns
Analytical Technique Top	Typical Applications	Signal Detected	Elements Detected	Organic Information	Detection Limits	Depth Resolution	Imaging/ Mapping	Lateral Resolution (Probe Size)
GC/MS GCMS	Identification and quantification of trace organic compounds	Molecular/characteristic fragment ions	Molecular ions to mass 1000	-	400 ng (full scan) 10 ng (outgassing)	-	-	-
HFS	Hydrogen in thin films (Quantitative)	Forward scattered hydrogen atoms	H, D	-	0.01 at%	50 nm	No	2 mm x 10 mm
Raman	Identification of organics and inorganics	Raman scattering	Molecular chemical identification from vibrational spectra	-	as low as 0.1 wt%	Confocal mode 1-2 µm	Yes	1 µm
RBS	Quantitative thin film composition and thickness	Backscattered He atoms	Li - U	-	1 - 10 at% (Z<20) 0.01-1 at% (20<Z<70) 0.001-0.01 at% (Z>70)	2 - 20 nm	Yes	2 mm
Analytical Technique Top	Typical Applications	Signal Detected	Elements Detected	Organic Information	Detection Limits	Depth Resolution	Imaging/ Mapping	Lateral Resolution (Probe Size)
SEM/ EDS	Imaging and elemental microanalysis	Secondary and backscattered electrons and X-rays	B - U	-	0.1 - 1 at%	1 - 5 micron (EDS)	Yes	4.5 nm (SEM) 1 micron (EDS)
FE SEM	High resolution imaging of polished precision cross sections	Secondary and backscattered electrons	-	-	-	-	Yes	1.5 nm
FE SEM (in lens)	Ultra-high resolution imaging with unique contrast mechanism	Secondary and backscattered electrons	-	-	-	-	Yes	0.7 nm
SIMS	Dopant and impurity depth profiling, surface, and microanalysis	Secondary ions	H - U	-	1e12 - 1e16 at/cc (ppb-ppm)	5 ­ 30 nm	Yes	1 micron (Imaging), 30 micron (Depth profiling)
Quad SIMS	Dopant and impurity depth profiling, surface, and microanalysis, insulators	Secondary ions	H - U	-	1e14 - 1e17 at/cc	<5 nm	Yes	<5 micron (Imaging), 30 micron (Depth profiling)
TOF SIMS	Surface microanalysis of polymers, plastics, and organics	Secondary ions, atoms, molecules	H - U	Molecular ions to mass 10,000	<1 ppma, 1e8 at/cm2	1 monolayer	Yes	0.10 micron
Analytical Technique Top	Typical Applications	Signal Detected	Elements Detected	Organic Information	Detection Limits	Depth Resolution	Imaging/ Mapping	Lateral Resolution (Probe Size)
TXRF	Metallic contamination on semiconductor wafers	Fluorescent X-rays	S - U	-	1e9-1e12 at/cm2	-	Yes	10 mm
XPS/ESCA	Surface analysis of organic and inorganic molecules	Photoelectrons	Li - U	Chemical bonding	0.01 - 1 at%	1 - 10 nm	Yes	10 µm - 2 mm
XRF	Thin film, thickness composition	X-rays	Na - U		10 ppm	-	No	100 µm